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1,多室型濺射成型設備。STM5412,STM5213,STM4415 |
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2,負載鎖定型濺射成型設備。STL5321,STL5111,STL5311 |
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3,批量型濺射成型設備。SRV4310,SRV6310,SRV7310 |
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4,在線型濺射成型設備。 |
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5,卷取式濺射成型設備。SDR系列 |
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6,超高真空濺射設備設備。STM2323 |
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7,研發用濺射成型設備。SRL3320,SDL4320,STL5520 |
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8,標準氣相沉積設備。AMF-C850SPB,AMF-C1065SPB,AMF-C1275SPB,AMF-C2280SPB |
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9,氣相沉積設備。AAMF-C1065SBR,AAMF-C2265SBR |
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10,負載鎖定型氣相沉積設備。AAMF-C845SB-L,AAMF-C1065SB-L,AAMF-C1275SB-L,AAMF-C1260SB-M |
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11,臥式氣相沉積設備。AAMH-C1075SB,AAMH-C1080SB,AAMH-C20130SB |
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12,直列式氣相沉積設備。CE-C450B,CE-750B,CE-C1040B |
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13,研發用氣相沉積設備。EM-330S,EM-435S,AM-645SB,AMF-645SB |
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14,用于大尺寸樹脂基板的氣相沉積設備。 |
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15,特殊規格氣相沉積設備。AMF-1675SB,AMF-1690SB,AMF-22100SB |
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16,等離子體CVD設備。 |
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17,等離子聚合設備。 |